Products

Contact Person : Ms. bo Kitty
Company Name : Changshu Tongrun Electronic Co., Ltd.
Tel : 86-512-52847596
Fax : 86-512-52173876
Address : Jiangsu,CHANGSHU,48Nijiaba Hongqiao Yushan zone Changshu city
Country/Region : China
Zip : 215500

Single Zone Tube Furnace (80 mm Dia 1200C Max.) with Vacuum Pump (10E-2 torr) + Three Channel Gas Control by Float-meter

Product Detailed

can achieve vacuum up to 10-2 torr and mix 1-3 type of gases for CVD or diffusion. Product Description

OTF-1200X-80-I-F3LV isCE certified split-able single zone Tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channels gas flowing system, which can achieve vacuum up to 10-2 torr and mix 1-3 type of gases for CVD or diffusion.

Specifications:

Furnace casing	Double layer steel casing with air cooling. Built in thermostat to control Cooling running automatically when case > 55oC
Power	2.5 KW
Voltage	AC 208-240V Single Phase, 50/60 Hz
Heating Element	Fe-Cr-Al Alloy doped by Mo
Max. Temperature	1200 oC
Continuous Temperature	1100 oC
Max. Heating Rate	<= 20 oC /min
Tube Size and Materials	Quartz tube: OD: 80mm x ID: 75 mm x Length: 1000 mm
Heating Zone length	400 mm
Constant temperature zone	150 (+/-1oC)
Temperature controller	Two precision temperature controllers and control two zone independently PID precision control by PWM solid relay 30 segments programmable for any temperature profile Built in protection for overheated and broken thermal couple
Temperature Accuracy	+/- 1 oC
Vacuum Seal	Two stainless steel flanges with vacuum gauge and valves and the leaking rate is 6 mtorr/min in max. and 2 in stable, click the picture below to get details chart and data measured by CE cetified vacuum meter: (For a whole 24 hours curve display, the time segment through 08:00:00~21:10:00 in X axis is passed over in the chart, therefore, steep variety in there)
Vacuum pump	Double Step Rotary Vane Vacuum Pump, 226L/m, with Exhaust Filter & KF-D25 Inlet - EQ-2TW-4C is included with max. vacuum pressure of 10-2 torr. Stainless steel hose tube is included for connecting to tube furnace.
Vacuum Sensor & display	Vacuum sensor is installed to vacuum flange of tube furnace, and connect to a digital vacuum pressure display which is installed in bottom mobile case.
Gas flow meter and pressure meter	Three gas flow-meters (4% accuracy FS) are installed inside mobile case which are able to monitor gases flowing rate (three different kinds of gases in total) 1) Compact direct read flow meter, 10-100 cc/min. 2) Compact direct read flow meter, 16-160 cc/min. 3) Compact direct read flow meter, 25-250 cc/min. Four pressure meters are installed inside mobile cart which are able to monitor three types of flowing gases pressure as well as the pressure of mixing tank.