Changshu Tongrun Electronic Co., Ltd.
Main products:Dry Cabinet,Nitrogen Cabinet
Products
Contact Us
  • Contact Person : Ms. bo Kitty
  • Company Name : Changshu Tongrun Electronic Co., Ltd.
  • Tel : 86-512-52847596
  • Fax : 86-512-52173876
  • Address : Jiangsu,CHANGSHU,48Nijiaba Hongqiao Yushan zone Changshu city
  • Country/Region : China
  • Zip : 215500

Laboratory Vacuum Tube Furnace

Laboratory Vacuum Tube Furnace
Product Detailed
Best Price, Good Quality.                Compact RTP Furnace with 4" Quartz Tube and Digital Vacuum Gauge up to 1100ºC  OTF-1200X-4-RTP is a CE certified  compact rapid thermal processing tube furnace with 4" I.D. processing quartz tube and vacuum flange. It is designed for annealing semiconductor wafer or solar cell up to 3" diameter. OTF-1200X-4-RTP is heated by 8 units of 1KW halogen light with max. heating rate of 100ºC/second. 50 segment precision temperature controller is built in with +/-1ºC. accuracy. RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.  

Specifications:

Furnace structure

Double layer steel case with mullite liner without water cooling or air cooling

Heating element

8 pcs 1Kw Halogen light tube,  ( Dia. =10mm,  L=300 mm, Heated Length  =200 mm)Standard working life : 2000 hrs.  ( depended on heating rate ) 

Heating zone

12" length with 4" constant temperature zone within +/-5ºC uniformity

Quart Tube & Sample Holder

Quart Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length3" diameter Sample holder is inserted to sliding flange, which is made of Aluminum Nitride (AIN).+\- 5°C temperature uniformityOne 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" diaAlN has very high thermal conductivity, which provides the best temperature uniformity in the sample areaThe sample holder is removable from flange and use the RTP for other purpose

Vacuum Flange

Made of stainless steel with double hi-temp. silicone O-rings, KF25 Vacuum Port and Needle Valves.Slide-out flange provides an easier way of loading, unloading the samples and other specific process needed.

Water Cooling Jacket

Cooling water is requiredPlease make sure the flow rate of cooling water is ≥ 10L/min, water temp. <25ºC; pressure > 25 PSIWe suggest you using recirculating water chiller as cooling system (please order separately at the related product below) to save water.

 

Warning:  This RTP furnace's max holding time shall be less than 600 seconds at 1000ºC ~ 1100ºC, otherwise O-ring may get melting

Flow-meter

One flow meter is installed on the front panel to adjust gas flow from 16 - 160 ml/min

Vacuum gauge

Digital vacuum gauge with a measurement range from 1 mtorr~800 torr is installed with the furnace.

Vacuum pressure & Gas FittingPressure can reach 50 mtorr by using mechanical vacuum pump with KF25 adapter.Pressure can reach 10-4 torr by molecular pump with KF25 adapter.

Temperature control

PID automatic control via SCR (Silicon Controlled Rectifier) power control, e.g. current limiting phase angle fired the resistor.

Thermal Couple

S type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath 

Programmable Temperature controller

Built in protection from overheated and broken thermal couple 30 programmable segments Auto tune functionTemperature control accuracy: +/- 1ºC Built in RS485 port for PC control Software is included. (Computer is not included)One 15" screen laptop with operation software installed is available as option at $900 extra cost.         

Max. Heating Rate

50ºC/sec .

Max. Cooling Rate

60ºC/min (Under vacuum: 200 mtorr), 117ºC/min (Under atmosphere pressure) Optional:   In order to achieve faster cooling rate < 10oC/second, you may choose RTP furnace with sliding rail. 

Working Temperature

1100ºC Max. 

Power Input

208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required) 

Dimension

Flange closed: 760 X 330 X 530 mm (30"W x 13"L x 21" H); Flange opened: 1200 X 330 X 530 mm (47"W x 13"L x 21" H)

Net weight

45 kg (100 lbs)
WarrantyOne year limited warranty for electrical parts. (Consumable parts such as processing tubes, o-rings and halogen lamp are not covered by the warranty, please order the replacement at related products below.)
CertificateCE certified
Optional You may combine the RTP furnace with high vacuum station or gas livery system as vacuum furnace or CVD system. 

Warning

Warning: The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 atm (absolute pressure)

Laboratory Vacuum Tube Furnace



Copyright Notice @ 2008-2012 ECVERY Limited and/or its subsidiaries and licensors. All rights reserved.